Microfluidic pumping with piezoelectric MEMS

Microfluidic systems have revolutionized biomedical diagnostics as well as lab-on-a-chip and organ-on-a-chip technologies by enabling precise manipulation of fluids at the microscale. A critical component of these systems is the pumping mechanism, which must be compact, energy-efficient, compatible with miniaturized platforms and possibly transparent to allow for optical analytic techniques. MEMS technologies have emerged as a promising solution for actuation at miniaturized platforms, offering low power consumption, contactless operation, and seamless integration with silicon-based microfabrication processes [1-2].

The focus of this Master thesis project is to develop a microfluidic pump based on the available piezoelectric MEMS technology, which has already demonstrated high-performance ultrasound transduction by means of PMUTs [3]. 

The candidate will be co-supervised by Dr. Alp Toymus (ECTM) and Dr. Tomas Manzaneque (EI).

References
1.     Yang, S. et al., Acoustic tweezers for advancing precision biology and medicine. Nat Rev Methods Primers 5, 49 (2025). [link]
2.     Wu, C. et al., Three-Phase ScAlN-based PMUT driven Acoustic Steaming Micropump, 15 September 2025, PREPRINT (Version 1) available at Research Square [link]
3.     Zhao, X., Pertijs, M., and Manzaneque, T., "Piezoelectric Micromachined Ultrasonic Transducer (PMUT) Based on Bilayer X-Cut Lithium Niobate," 2025 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Orlando, FL, USA, 2025, pp. 530-533 [link]

Assignment

The project will have a duration of 9 to 12 months, and will involve the following tasks:

1. A literature review of the state-of-the-art in microfluidic pumps and acoustic tweezers;
2. Analytical and finite element analyses of the PMUTs for targeted microfluidic pumping;
3. Microfabrication of the optimized designs at Kavli Nanolab cleanroom;
4. In vitro characterization of the fabricated devices;
5. Reporting & Thesis writing

Requirements

You are an ambitious, hands-on master student with a background in (micro)electronic or mechanical. You have an affinity for working in a multi-disciplinary context, including microfabrication, design and characterization of devices. Prior experience with or motivation to learn FEM software is recommended. You have good communication skills in English, you are independent and a team player.

Contact

Last modified: 2025-10-03